PRS故障维修手册20091228.docVIP

PRS基本故障與排除 1、PRS 故障訊息 2、故障原因排除 PRS 故障訊息 FAULT ! EXHAUST FAIL ! 故障！排氣 失敗！ Fault : Total process time is large than setting time about 10 second 故障！總製程時間大於設定時間約10秒 Fault : 測漏---- 不合格! : 測漏---- 不合格! FAULT! ,ICP_RF Reflective power is large than setting value P_RF_F % 設定內容 FAULT! ,ICP_RFs Forward power is large than setting value P_RF_F % 故障！射頻輸入功率大於設定值設定內容 FAULT! ,ICP_RFs Forward power is less than setting value P_RF_F % 故障！設頻輸入功率小於設定值設定內容 FAULT! COMPRESS AIR FAIL ! 故障！壓縮空氣(CDA供壓)失敗！ FAULT! MFC( i ) flow is large than setting value P_GAS_F % 故障！質流控制器(MFC)流量大於設定值！ FAULT! MFC( i ) flow is less than setting value P_GAS_F % 故障！質流控制器(MFC)流量小於設定值！ FAULT! PRESSURE(MKS) is large than setting value P_MKS_F % 故障！壓力(MKS)大於設定值！ FAULT! PRESSURE(MKS) is less than setting value P_MKS_F % 故障！壓力(MKS)小於設定值！ FAULT! PUMP system fail ! 故障！幫浦系統失敗！ FAULT! WATER FLOW fail ! 故障！冷卻水流量失敗！ Fault: CHAMBER LID OPEN ! 故障！腔體門蓋開啟！ Fault: ERROR_FLAG RISE 故障！錯誤訊號發生！ Fault: GAS CONTROL ERROR ! 故障！氣體控制錯誤！ Fault: I7000 DI MODULE( (CH_LID \ H10000) ) ERROR ! 故障！I7000 DI(數位輸入) 模組 錯誤 ! Fault: I7000 DO MODULE( (RV_VALVE \ H10000) ) ERROR ! 故障！I7000 DO(數位輸出) 模組 錯誤 ! Fault: I7000(SMC) ERROR ! 故障！I7000 (SMC) 錯誤 ! Fault: ICP_RF AUTO MATCHING ERROR ! 故障！射頻自動匹配錯誤 ! Fault: MACHINE INITAL ERROR ! 故障！匹配初始錯誤 ! Fault: MKS- CLOSE -- ERROR ! 故障！MKS(節流閥)關閉錯誤 ! Fault: MOTOR BREAK ERROR ! 故障！(旋轉模組)馬達損壞錯誤 ! Fault: MOTOR SET ERROR! 故障！(旋轉模組)馬達設置錯誤 ! Fault: PUMP DOWN TIME OUT ! 故障！抽氣時間過長 ! Fault: Pump to base pressure failed ,initial time out! 故障！抽至基楚壓力失敗，初始時間過長 ! Fault: READ PRESSURE(MKS)-- ERROR ! 故障！讀取壓力(MKS gauge)失敗 ! Fault: RF CONTROL ERROR ! 故障！射頻控制失敗失敗 ! Fault: Rotor Speed read error ! 故障！轉子(旋轉模組)速度讀取失敗 ! Fault: SERVO PRESSURE ERROR ! 故障！伺服壓力失敗 ! Fault: SET ICP_RF POWER OFF ERROR. 故障！設定射頻電源關閉失敗！ Fault: SET ICP_RF REMOTE MODE ERROR. 故障！設定射頻遙控模式失敗！ Fault: SET ICP_RF SECHO OFF ERROR. 故障！設定射頻回應關閉失敗！ Fault: SET MOTOR STOP ERROR ! 故障！設定馬達停止失敗！ Fault: SYST