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制造技术/工艺装备 2010 6
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( 1, 310053; 2, 31005 1)
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: TH 16 : A : 1671) 3133( 2010) 06) 0099) 03
The research of fix ed abrasive diam ond w ire saw technology
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DU H ong-w en , X I Zhen-q ang
( 1 Zhej ang Inst tute of M echan ca l and E lectr ca l Eng neer ng, H ang zhou 310053, Ch na;
2 M ater a l Research Ins t tut on, Zhej ang Sc-T ech Un vers ty, H angzhou 310051, Ch na)
A b stract: D amond w re saw s used fo r hard-br ttle m ater a l prec se cutt ng w th low kerf- loss. A s a further deve lopm ent and an
env ronm en tally fr end ly techno logy, f x ed ab ras ve d amond w re cutt ng s w dely appl ed to s l con w afer m anufac tur ng n sem -
conductor and pho tovo lta c ndu stry due to ts econom y and h gh cutt ng eff c ency. P erform ed tr a l and analys s on cutt ng pa rame-
ters and fa lure m echan sm of f xed abras ve d amond w re saw ( fo r s l con w afer mach n ng) w th ava lab le dom est c equ pments
and nterna t ona l h gh qual ty d amond w re. Expected to be a gu dance fo r m prov ng e ff c ency and qua l ty o f s l con m ate r al cut-
t ng.
K ey w ords: d am ond w re saw; cutt ng param eters; ana ly s s and research
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