聚合物热分解法下金属基类金刚石薄膜的制备及其性能研究.pdf

th 10 OAPS Working Paper Series Paper No. 2013-031 Website: http://www.oaps.hk/ 聚合物热分解法下金属基类金刚石薄膜的制备及其性能研究 施典 王红宾 材料科学与工程学院 摘要 类金刚石薄膜具有硬度高、耐腐蚀、高绝缘、高导热率、制备成本低等特点，是十分优秀的机 械功能材料。然而我们另辟蹊径，期望在保持其机械性能的同时，充分开发和应用其同样优秀的光 学性能。为此，我们以 自制的多孔聚碳苯作为前躯体，采用常见的聚合物热解为制备方法，通过大 量的制备实验探索出了较为合适的薄膜制备工艺路线，同时对薄膜的性能进行了表征，以探究各个 环境因素对薄膜性能的影响机理，并利用该机理实现了薄膜多种色彩的可控呈现。本实验可操作性 强，具有直观的应用价值，为类金刚石薄膜打开光学应用市场完成了初步的技术准备。 关键词：类金刚石薄膜 光学性能 聚合物热解法 ABSTRACT Diamond like carbon(DLC) film has high hardness, good corrosion resistance, high insulation, high thermal conductivity, low preparation cost and other characters that make it a splendid mechanical functional material. However, to find another way, we hope to explore and utilize its same good optical performance and at the same time, maintain its mechanical characters. Using self-made porous poly carbon benzene as precursor and common used polymer pyrolysis as preparation method, we explored out a much suitable film preparation route by a mass of preparation experiments and characterized the films performance to probe into the films influence mechanism exerted by environment variables, which has been applied to realize the preparation of controllable multicolor DLC film. Our experiment has a strong maneuverability and is of visible application value, which has finished preliminary technical preparation for DLC films optical application market. KEYWORDS: Diamond Like Carbon film optical performance polymer pyrolysis 1 引言 类金刚石碳膜 (Diamond like Carbon Film，简称类金刚石膜)[1] ，或称为氢化非晶碳 类金刚石膜，具有优异的力学特性、电气特性、光学特性、热学特性和化学稳定性等 一系列类似于金刚石的性能，是近年来引起人们广泛重视的一种新型功能薄膜材料。 但与金刚石膜相比，类金刚石膜的制备工艺比较简单易行,是一种应用前景十分看好的 膜质功能材料。 上海交通大学 SJTU