利用晶体生长计算软件FEMAG进行蓝宝石晶体生长仿真方法.ppt

CONFIDENTIAL FEMAG-HEM FEMAG-HEM Software to simulate Sapphire Growth by Heat Exchange Method Specifications: Temperature in the sapphire and in all furnace components by solving the global heat transfer in the furnace (radiation, conduction , convection). Flow velocity in the sapphire liquid phase. Crystallization front shape Advanced radiation heat transfer in the sapphire Gas convection Anisotropic thermal stresses in the crystal Page ? * CONFIDENTIAL * On the left: temperature distribution in all the furnace (sapphire, crucible, heater, ….) On upper right : velocity in liquid part of the sapphire On lower right : the thermal stress in the crystal depending the orientation of the crystal (A-axis, C-axis) * The FEMAG software are global. You see examples: Left : a HEM furnace to growth sapphire, each part of the furnance is consideres Right : a CZ furnace to growth Silicon * FEMAG Soft are dynamic: Left picture : A simulation for DS in 3D , le black line is the crystallization front Middle picture : A Simulation dor DS in 2D, some parts of the furnaces can be move Right picture : A simulation for CZ, on the right part is the temperature evolution and on the left velocity evolution * The 3 main process to growth sapphire are: Czochralski with induction heating or ohmic heating Kyropoulos HEM (Heat Exchange Method) FEMAGSoft provides Soft for the 3 processes If you have another process, we * Upper pictures show the temperature distribution and the solidification interface for different time, it is not a dynamic simulation but steady simulation at different time, the dynamic simulation mode is not yet available but will be in the next release this year. Lower pictures show the corresponding melt flow, the color is related to the velocity amplitude, it possible to show the velocity vector and the streamline using Paraview * Because it a crystal, the stress is different depending the orientation of the crystal structure (A axis or C axis). We calculate the stress