钨粉颗粒级配对氧化铝陶瓷金属化方阻的影响.pdf

第 17 卷第 5 期 粉末冶金材料科学与工程 2012 年 10 月 Vol.17 No.5 Materials Science and Engineering of Powder Metallurgy Oct. 2012 钨粉颗粒级配对氧化铝陶瓷金属化方阻的影响 吴 茂，陈晓伟，曹车正，赵 聪，何新波，曲选辉 (1. 北京科技大学 新金属材料国家重点实验室，北京 100083 ； 2. 北京市先进粉末冶金材料与技术重点实验室，北京 100083) 摘 要：选取 3 种平均粒径分别为 0.2、0.5 和 1 μm 的钨粉，将任意2 种钨粉按一定的质量比混合后与氧化铝陶 瓷共烧，得到氧化铝陶瓷的金属化层，研究钨粉颗粒级配对氧化铝陶瓷金属化方阻的影响。结果表明，钨金属化 层的方阻与其烧结致密化程度直接相关，钨金属化层越致密，其表面方阻越低。单独使用其中 1 种粒度的钨粉与 氧化铝陶瓷共烧时，金属化方阻较高。将 0.5 μm 和 1 μm 钨粉混合能显著降低方阻，当两者质量比为 45:55 时得 到的金属化方阻最小(12.10 mΩ/□) 。混合钨粉的累积分布曲线符合Dinger-Funk 粉体堆积公式，分布模数 n 越接近 0.37，其烧结致密化程度越高，金属化方阻越低。 关键词：钨金属化；表面方阻；Dinger-Funk 公式；颗粒级配 中图分类号：TN452 文献标识码：A 文章编号：1673-0224(2012)5-579-07 Effect of tungsten particle size distribution on sheet resistance of alumina ceramic metallization WU Mao, CHEN Xiao-wei, CAO Che-zheng, ZHAO Cong, HE Xin-bo, QU Xuan-hui (State Key Laboratory for Advanced Metals and Materials, Beijing Key Laboratory for Powder Metallurgy and Particulate Materials/University of Science and Technology Beijing, Beijing 100083, China) Abstract: The effect of particle size distribution of tungsten powders on sheet resistance of alumina ceramic metallization was investigated in the present paper. Three kinds of tungsten powder with average particle size of 0.2, 0.5 and 1 μm were adopted, two of them were mixed in accordance with an certain mass fraction and co-sintered with alumina ceramic. It is found that the sheet resistance strongly depends on the sintered densification of tungsten metallization. The more d