晶体生长软件FEMAG之浮区法晶体生长法.ppt

利用晶体生长软件FEMAG浮区法进行晶体生长 Roman Rolinsky2, Nathalie Van den Bogaert2, Michael Wünscher3, David Despas1, Arnaud de Potter2, Fran?ois Dupret1,2 1 CESAME Research Center Université catholique de Louvain, Belgium 2 FEMAGSoft S.A., Belgium 3 Leibniz Institute for Crystal Growth (IKZ), Berlin, Germany + 32 10 22 64 52 info@ FEMAGSoft ? 2011 Quasi-steady simulation of the growth of a 100 mm silicon crystal (1mm/min pull rate) Global temperature field (left), melt flow (right), and alternating magnetic field (bottom) Introduction FEMAGSoft ? 2011 Quasi-steady thermal equilibrium adapted heater power to get the prescribed crystal diameter heat source on the solidification and melting fronts in proportion to the pull rate Inverse dynamic adapted heater power to grow the prescribed crystal shape effect of pull rate and solid-liquid interface deformation on the solidification heat Direct dynamic calculated crystal shape prescribed heater power history effect of pull rate and solid-liquid interface deformation on the solidification heat Time dependent Quasi-steady Quasi-dynamic frozen geometry (except the solid-liquid interfaces) adapted heater power to get the prescribed crystal diameter effect of pull rate and solid-liquid interface deformation on the solidification heat Different simulation techniques Introduction (cont’d) FEMAGSoft ? 2011 Inverse dynamic often more reliable than quasi-steady model highly attractive to predict crystal quality Quasi-steady frequently used cheap, but not always valid does not allow crystal quality prediction Direct dynamic simulation of the system response to perturbations of the input parameters Quasi-dynamic may capture the detailed system dynamics at various stages very useful for controller design Different simulation techniques (cont’d) Introduction (cont’d) FEMAGSoft ? 2011 Inverse modeling in FZ growth much more difficult problem than in Cz growth can lead to misleading interpretations of the simulation resul