石英挠性加速度计摆片组件的应力分析.pdfVIP

第 27卷第 10期 Vol. 27 No. 10 2010年 10月 Journal ofM echan ical E lectrical Eng ineering O ct. 2010 * * 李 安, 张云电 ( , 310018) : , , Pro/E , ANSYS, 0. 02 mm , , , : ; ; : TH 113; U . 12 : A : 1001- 4551( 2010) 10- 0001- 04 Stress analysis of quartz flexible accelerom eters chip components LIAn, ZHANG Yundian ( College ofM echan ical Engineering, H angzhou D ianziUn iversity, H angzhou 310018, Ch ina) Abstract: A mi ing at the fracture phenom enon easily happened on the beam of the quartz flexib le accelerometers chip components, through the analysis of quartz flexible accelerom eter works, the th reedmi ensionalm odeling of the quartz chip and the alum inum fram e was built and equ ipped in Pro/E, and the stress analys is of the component was smi ulated in ANSYS according to the load calcu lation, the m axmi um dis p lacem ent and stress fieldsw ere given under the actual offset 0. 02mm deform ation on the quartz chip com ponents, then the optmi ization pro gram of the quartz ch ip beam w as proposed under the stress d istribu tion. The resu lts indicate that them axmi um stress of the quartz chip com ponents remain the sam e increasing as acceleration loads and less than the allowable stress of quartz m aterial. K ey word s: chip components; stress analysis; fin ite elem ent smi u lation , 0 Pro/E [ 1] ANSYS, , , [ 2] , 0. 02 mm [ 3] ,