多层介质膜光栅用高反射镜的严格耦合波分析.pdf

No．6 第38卷第6期 光子学报 VoI．38 2009 2009年6月 ACTAPHoToNICASINICA June forthe Reflective RigorousCoupled-。waveAnalysis High Mirror inM Used Dielectric ulti—layer Grating。 KONG Fu—kail Wei_jinl，YUN 9 Mao—jinl，SHAN FAN Jian—da2 Zheng—xiu2．SHAO (1 266071，China) CollegeofPhysicsScience。QingdaoUniversity。Qingdao，Shandong (2 Institute andFine 201800，China) Shanghai ofOptics Mechanics，ChineseAcademyofSciences，Shanghai stable matrix on Abstract：An transmittance based enhanced，numerically approach rigorous in of thin the character dielectric coupled-waveanalysis(RCWA)wasapplied optical multi—layer of in film．A reflectivemirrorused dielectricwas designhigh multi—layer gratingpresentedusing the methodofRCWA．The ofthefabricatedreflectivemirror a opticsspectral high presentsgood withthe whichis the agreementdesign optimizedby coupled-waveanalysis． employingrigorous reflective