多弧离子镀(Ti,Al,Zr)N多元超硬梯度膜的制备及力学性能研究.pdf

第30卷第3期 真空科学与技术学报 VACUUM 2010年5、6月 CmN联狐JOI『RNAI．0FS(硼喇(玉ANDTECHNOU)G吖 329 多弧离子镀(Ti，A1，Zr)N多元超硬梯度膜的 制备及力学性能研究 崔贯英张钧’ (沈阳大学机械上程学院沈阳 1 10044) GrowthandMechanical of Gradient PropertiesSuper-Hard Ion (Ti，AI，Zr)N Multi-Arc Coatingsby Plating Cui Cuanying，觋Jun。 110044，Ch／na) (Co／／ege矿Mechan／ca／Eng／峨，ShenyangUniversity，Shenyang were multi-arcion withtheTi—A1一 Abstract‰superhard，composite(Ti，A1，Zr)Ncoatingsdeposited by plating zr W1 on 8Cr4Vsteelsubstmtes．11leofthefilm alloytargethighspeed impacts deposition depositionconditions，including rate，biasvoltage，andpartial its werestudied．111emicrostructuresandmechanical nitrogenpressure，onquality properties 0ftlle werecharacterizedwith electron and as—deposited(Ti，AI，Zr)Ncoatings X—raydiffraction。scanningmicroscopy conventionalmechanical resultsshow the witll that theTi．A1一Zra1． probes．The gradient(Ti，AI，Zr)Ncoatingsdeposited have inteffacial betterthermalshockresistancethanotherhard 10ytarget highermicro-hardness，strongeradhesion，and as thickfilms．Possiblemechanismswerealso discussed． coatings，suc