Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and.pdf
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Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and
Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical
and Electromechanical Imaging in Liquids
1,2 1 2 2 *,1,2 †,2
B.J. Rodriguez, S. Jesse, K. Seal, A.P. Baddorf, S.V. Kalinin, and P. Rack
1Materials Science and Technology Division and the 2Center for Nanophase Materials
Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831
Insulated cantilever probes with a high aspect ratio conducting apex have been
fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated
with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled
with tungsten to create an insulated probe with a conducting tip. The stiffness and Q-factor of
the cantilevers increased after the modifications and their resonances shifted to higher
frequencies. The coupling strength between the cantilever and the coating are determined. The
applications to conductive and electromechanical imaging of ferroelectric domains are
illustrated, and a probe apex repair process is demonstrated.
PACS: 07.79.Lh, 81.16.–c, 77.80.Dj
*
Corresponding author, sergei2@ornl.gov
† Corresponding author, prack@utk.edu
1
The ubiquity of electromechanical phenomena in biological and biomolecular systems
1 2
ranging from voltage controlled muscular contractions, to cell electromotility, ion channels,
3
and electromotor proteins necessitate probing these phenomena on the tissue, cellular, sub-
cellular, and molecular levels.
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