Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and.pdf

Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and.pdf

  1. 1、本文档共14页,可阅读全部内容。
  2. 2、有哪些信誉好的足球投注网站(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
  3. 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载
  4. 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and

Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and Electromechanical Imaging in Liquids 1,2 1 2 2 *,1,2 †,2 B.J. Rodriguez, S. Jesse, K. Seal, A.P. Baddorf, S.V. Kalinin, and P. Rack 1Materials Science and Technology Division and the 2Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831 Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q-factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. The applications to conductive and electromechanical imaging of ferroelectric domains are illustrated, and a probe apex repair process is demonstrated. PACS: 07.79.Lh, 81.16.–c, 77.80.Dj * Corresponding author, sergei2@ornl.gov † Corresponding author, prack@utk.edu 1 The ubiquity of electromechanical phenomena in biological and biomolecular systems 1 2 ranging from voltage controlled muscular contractions, to cell electromotility, ion channels, 3 and electromotor proteins necessitate probing these phenomena on the tissue, cellular, sub- cellular, and molecular levels.

文档评论(0)

yaobanwd + 关注
实名认证
内容提供者

该用户很懒,什么也没介绍

1亿VIP精品文档

相关文档