Microstructures and optical properties of Cudoped ZnO films prepared by radio.pdf

Applied Surface Science 257 (2011) 10036–10041 Contents lists available at ScienceDirect Applied Surface Science j o u r n a l h o m e p a g e : w w w. elsev /locate/aps usc Microstructures and optical properties of Cu-doped ZnO films prepared by radio frequency reactive magnetron sputtering Ligang Ma, Shuyi Ma ∗ , Haixia Chen, Xiaoqian Ai, Xinli Huang College of physics and Electronics Engineering, Key Laboratory of Atomic and Molecular Physics Functional Materials of Gansu Province, Northwest Normal University, Lanzhou, Gansu, 730070, China a r t i c l e i n f o a b s t r a c t Article history: Pure and Cu-doped ZnO (ZnO:Cu) thin films were deposited on glass substrates using radio frequency Received 21 May 2011 (RF) reactive magnetron sputtering. The effect of substrate temperature on the crystallization behavior Received in revised form 27 June 2011 and optical properties of the ZnO:Cu films have been studied. The crystal structures, surface morphology Accepted 27 June 2011 and optical properties of the films were systematically investigated by X-ray diffraction (XRD), scanning Available online 2 July 2011 electron microscopy (SEM) and a fluorescence spectrophotometer, respectively. The results indicated that ZnO films showed a stronger preferred orientation toward the c-axis and a more uniform grain size PACS: after Cu-doping. As for ZnO:Cu films, the full width at half maxima (FWHM) of (0 0 2) diffraction peaks 78.20.−e