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Reflections Function Method In the XRay Reflectometry
Reflections Function Method In the X - Ray Reflectometry
N.V. Bagrets, E.A. Kravtsov, V.V. Ustinov.
Institute of Metal Physics, 18, Kovalevskaya St., Ekaterinburg, 620219, Russia
(Dated: February 1, 2008)
2 The theory of specular X-ray reflectivity from a rough interface based upon the reflection function
0 method (RFM) is proposed. The RFM transforms the second order differential equation for the
0 wave amplitude into the non-linear first order differential equation of Riccati type for the reflection
2 function. This equation is solved in the approximation of the abruptly changing potential, which is
justified for the typical angles of X-ray reflectometry. The reflectivity is represented as a series. The
y first term of this series reproduces the Nevot-Croce approximation and second one gives the phase
a correction for greater angles. It is shown that the phase correction can be used to obtain the degree
M of interface asymmetry. The X-ray reflectometry model profiles for Fe/Cr superlattice are used to
illustrate the method.
5
] The X-ray reflectometry is a useful tool for studying electric field E (z) in the form
i
c surface and interface structure in thin films and multi-
s- layers. Usually, the rough surface X-ray reflection is an- −1/2 i z
l E (z) = q (z) A(z) exp 2 q (x)dx +
r alyzed in the framework of the plane-wave Born approxi- z0
t mat
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