基于杨氏双缝干涉原理的SOI微环生物传感器结构与模拟.pdfVIP

Vol. 32,No. 7 JournalofSemiconductors July2011 Anovelstructureof silicon-on-insulator microringbiosensorbasedonYoung’s two-slitinterferenceand its simulation Su Baoqing(苏保青),WangChunxia(王春霞) ,Kan Qiang(阚强),Li Junhua(李俊华), Xie Yiyang(解意洋),WangZhenzhen(王真真),and Chen Hongda(陈弘达) State Key Laboratory Integrated Optoelectronics, Institute of Semiconductors,ChineseAcademyofSciences, Beijing 100083, China Abstract: Anovelsilicon-on-insulatormicroringbiosensorbasedonYoung’stwoslitinterferencehasbeendemon- strated. The transducer signal from electric field intensity distribution on the interference screen is given by using the transfer matrix method (TMM) and two-slit interference principle. The result shows that the structure we pro- poseisadvantageousforsensingastheinterferencepatternisverysensitivetotheambientrefractiveindexaround the microring. A small perturbation in refractive index around the microring c will result in a notable shift of destructive interference points (DIPs) on the interference screen. By detecting the shift of the DIPs, the ambient refractiveindexchange can be obtained. Keywords: silicon-on-insulator; microring; Young’stwo-slit interference; biosensor DOI: 10.1088/1674-4926/32/7/074010 EEACC: 4140;4145 1. Introduction have been proposed that are optimized for sensing: increasing the factorbyenlargingsensingcavitylength orenhancing The optical biosensor is an important detection and ana- thenotchdepthsbyconcentricmicroringresonators.Com- lysistoolthathasbeenwidelyused