TiNTi多层膜韧性对摩擦学性能的影响.pdf

26 材料工程／2009年10期 TiN／Ti多层膜韧性对摩擦学性能的影响 Influenceof on PerformanceofTiN／Ti Tribological Toughness Coatings Muhilayer 龚海飞，邵天敏 (清华大学摩擦学国家重点实验室，北京100084) GONGHai—fei，SHAOTian—min of 100084，China) (State University，Beijing KeyLaboratoryTribology，Tsinghua 摘要：考察了TiN／Ti多层膜韧性对其摩擦学性能的影响。采用磁过滤阴极弧沉积的方法制备了具有不同Ti子层厚度 损试验机，进行了压痕测试和摩擦磨损实验。结果表明，TiN／Ti多层膜中Ti子层的加入显著提高了多层膜的韧性，相 对TiN单层薄膜，当载荷较大时，多层膜的耐磨性有明显的改善。结合实验结果，讨论了TiN／Ti多层膜韧性对其耐磨 性的影响。 关键词：TiN／Ti；多层膜；韧性；摩擦学性能 文献标识码：A 文章编号：1001—4381(2009)10—0026—06 中图分类号：THll7 of wasinves— of on TiN／Ti coatings Abstract：Influencetoughnesstribologicalperformancemuhilayer methodwas to the cathodevacuum appliedprepareTiN／Ti tigated．Filtered arc(FCVA)deposition differentTi thickness．Transmissionelectron with multilayercoatings sublayer the usedobservethelaminatestructureandindividualthicknessof TiN／Ti was to layer multilayer carriedoutOnRockwell—Chardmeteranduniver— testandwear were experiment coatings．Indentation salmicrom8【terials resultsshowedthattheintroduc— tester(UMT)，respectively．Theexperimental