一种新颖的制备聚合物光电薄膜的旋涂装置.pdf

doi：10．3969／j．issn．1003—353x．2010．09．012 一种新颖的制备聚合物光电薄膜的旋涂装置 文尚胜，王保争，张剑平，桂宇畅，赵宝锋 (华南理工大学高分子光电材料与器件研究所，广州510640) 摘要：设计了一种新颖的制备聚合物光电薄膜的旋涂装置。该设计在传统旋涂装置的基础 了．通过增加聚合物溶液载台转盘法向进动功能，改进了聚合物溶液成膜质地疏松、致密度不高 问题，减少了成膜过程中产业气泡等缺陷的几率。通过增加聚合物溶液栽台转盘径向变轴功能， 改善了聚合物薄膜径向厚度的均匀性，从而可以借助于旋涂法制备更大尺寸的薄膜器件。理论和 试验结果表明，该项改进设计对提高聚合物光电薄膜的制备质量有一定的实用价值。 关键词：聚合物；旋涂；均匀性；薄膜 1 文献标识码：A 中图分类号：TN305；061 of for ThinFilms NewKindSpin-CoatingEquipmentPolymer Wen Shangsheng，WangBaozheng，ZhangJianping，GuiYuchang，ZhaoBaofeng Materialsand China (InstituteofPolymerOptoelectronic Devices，SouthUniversity 510640，China) ofTechnology，Guangzhou newkindof for thinfilmswas basedonthe Abstract：A spin·coatingequipmentpolymer designed design oftraditional the functiononnormaldirectionofthe spin—coatingdevice．Byaddingupwardprocessing polymer solution aboutloosetextureandlow were the turntable，the densitysolved，and platform problems probability asbubblesinthe offilmformationWas ofdefects such theaxis process reduced．By forming adding varying radialdirectionof solution ofthickness on functionon tumtable，the polymer platform performance uniformity of thinfilmsWas thinfilmdevicesCanbe radialdirection