27-A MEMS-based piezoelectric power generator array for vibration.pdf

ARTICLE IN PRESS Microelectronics Journal 39 (2008) 802–806 /locate/mejo A MEMS-based piezoelectric power generator array for vibration energy harvesting a, a b b a Jing-Quan Liu , Hua-Bin Fang , Zheng-Yi Xu , Xin-Hui Mao , Xiu-Cheng Shen , Di Chena b a , Hang Liao , Bing-Chu Cai aNational Key Lab of Micro/Nano Fabrication Technology, Key Lab for Thin Film and Micro-fabrication Technology of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, PR China bACS Sensors Lab, Honeywell, Shanghai 201203, PR China Received 13 September 2007; accepted 15 December 2007 Available online 20 February 2008 Abstract Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured with fixed/narrow operation frequency and power output in microwatt level, whereas, the frequency of ambient vibration is floating in some range, and power output is insufficient. In this paper, a power generator array based on thick-film piezoelectric cantilevers is investigated to improve frequency flexibility and power