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《nanoscale focused ion beam from laser-cooled lithium atoms》.pdf
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Nanoscale focused ion beam from laser-cooled lithium atoms
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2011 New J. Phys. 13 103035
(/1367-2630/13/10/103035)
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New Journal of Phys ics
T h e o p e n – a c c e s s j o u r n a l f o r p h y s i c s
Nanoscale focused ion beam from laser-cooled
lithium atoms
1 1 2 1,3
B Knuffman , A V Steele , J Orloff and J J McClelland
1 Center for Nanoscale Sciences and Technology, National Institute
of Standards and Technology, Gaithersburg, MD 20899, USA
2 FEI Company, Hillsboro, OR 97124, USA
E-mail: jabez.mcclelland@
New Journal of Physics 13 (2011) 103035 (9pp)
Received 18 August 2011
Published 26 October 2011
Online at /
doi:10.1088/1367-2630/13/10/103035
Abstract. We demonstrate a new type of nanoscale focused ion beam (FIB)
based on photoionizing laser-cooled atoms held at millikelvin temperatures in
a magneto-optical trap (MOT). This new source expands the range of available
ionic species and accessible ion beam energies for FIBs, enhancing their role as
one of the most important tools for nanoscale characterization and fabrication.
We show examples of microscopy with lithium io
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