《Study_of_Light_Scattering_by_Small_Particles》.pdf

Study of Light Scattering by Study of Light Scattering by Small Particles Small Particles Harrison H. Chin Harrison H. Chin 7/1/2003 7/1/2003 Light Scattering Study Light Scattering Study Study of light scattering by small PSL spheres using NIST SCATMECH C++ Study of light scattering by small PSL spheres using NIST SCATMECH C++ Library code, and comparing the results with DDSURF and Xtreme. Library code, and comparing the results with DDSURF and Xtreme. Various sizes of PSL spheres on smooth Silicon substrate illuminated with Various sizes of PSL spheres on smooth Silicon substrate illuminated with three wavelengths (532, 350, and 266nm), P and S polarization, and various three wavelengths (532, 350, and 266nm), P and S polarization, and various incident angles. For comparison purposes the NA was set to 0.41, the value incident angles. For comparison purposes the NA was set to 0.41, the value of our current high mag lens. Results indicate all 3 sources of data have good of our current high mag lens. Results indicate all 3 sources of data have good agreement. agreement. Assuming identical power density, it is inferred that we should be able to Assuming identical power density, it is inferred that we should be able to detect 55nm and 42nm PSL spheres @ 350nm (P) and @ 266nm (P) detect 55nm and 42nm PSL spheres @ 350nm (P) and @ 266nm (P) respectively, based on current capability of 80nm PSL detection @ 532nm (P). respectively, based on current capability of 80nm PSL detection @ 532nm (P). For small particles (relative to the wavelength), P-polarization produces For small particles (relative to the wavelength), P-polarization produces higher scattered intensity than S-polarization does. However, the top higher scattered intensity than S-polarization does. However, the top mounted CCD is not preferred for collecting P-polarized scattered light. mo