《2016_JMEMS_Architectures for Vibration-Driven Micropower》.pdf

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 13, NO. 3, JUNE 2004 429 Architectures for Vibration-Driven Micropower Generators Paul D. Mitcheson, Student Member, IEEE, Tim C. Green, Senior Member, IEEE, Eric M. Yeatman, Member, IEEE, and Andrew S. Holmes, Member, IEEE Abstract— Several forms of vibration-driven MEMS micro- such power sources using MEMS technology is attractive in generator are possible and are reported in the literature, with order to achieve small size and high precision. potential application areas including distributed sensing and Vibration-driven generators based on electromagnetic ubiquitous computing. This paper sets out an analytical basis for their design and comparison, verified against full time-do- [4]–[7], electrostatic [8]–[10] or piezoelectric technologies main simulations. Most reported microgenerators are classified [11], [12] have been demonstrated. While some of the re- as either velocity-damped resonant generators (VDRGs) or ported generators have already been fabricated using MEMS Coulomb-damped resonant generators (CDRGs) and a unified an- techniques [7], [8], [10], [11], others have been made on a alytical structure is provided for these generator types. Reported mesoscale with the intention of later miniaturizing the devices generators are shown to have operated at well below achievable power densities and design guides are given for optimising future using MEMS [6], [13]. devices. The paper also describes a new class—the Coulomb-force A general and unified analytical framewor