- 1、本文档共8页,可阅读全部内容。
- 2、有哪些信誉好的足球投注网站(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
《Innovative Optical Technique Speeds Up LED Wafer Scribing Production》.doc
Innovative Optical Technique Speeds Up
LED Wafer Scribing Production
Leon Chen, Robbie J.Z. Lee,*Todd Lizotte
* Hitachi Via Mechanics USA, Inc., Emerging Technology Group,
4 Delta Drive, Suite 6, Londonderry, NH 03053
ABSTRACT
Laser scribing technology was introduced in LED wafer singulation four years ago and has been gaining significant success. But as GaN/Sapphire wafers keep shrinking the LED chip size (8mil) yet continue to remain on a 2 wafer size, laser process engineers face heavy pressure from the LED industry to further increase throughput. Since raising laser power degrades the performance of GaN, a process engineer cant just substitute a higher power laser and expect quicker throughput. Even if the scribing speed can be increased with a higher powered laser, the efficiency on throughput wont be significant because of the small wafer size and enormous amount of dicing streets. In order to efficiently utilize a more powerful laser, beam splitting optic need to be employed to?scribe the wafer with simultaneous multiple beams. During production we used a triple beam design and found that even scribing at one-third the speed, we can get more than 30% increase in throughput. How this technique adapts into this application will be presented in this paper, as well as the challenges encountered under a real production environment.
?
Keywords: Scribing, Dicing, LED, Laser, Beam Splitter, Shaping, Diffractive, DPSS, Wafer
INTRODUCTION
Blue LED is fabricated by GaN grown on a sapphire substrate. Because of the hardness of sapphire and the LED’s industries unstopped demands of cost reduction, UV lasers were introduced for scribing GaN/Sapphire chips. Scribing with UV lasers was initially proposed in the early 90’s [1][8] as UV laser sources began to proliferate, however its been the development of blue LED’s that have popularized the use of UV scribing laser applications. Because of the difficulty of growing GaN over an area greater then 2, the LED producers nee
您可能关注的文档
- 《Hpi齿轮油泵》.pdf
- 《HSE Bulletin 50-2016 Welding Safely》.ppt
- 《Hy01-100x25齿轮油泵》.pdf
- 《Hy01-18x25齿轮油泵》.pdf
- 《Hy01系列齿轮油泵》.pdf
- 《Hydromax齿轮油泵》.pdf
- 《ICCAP Wafer Mapping自动测试流程》.pdf
- 《Impedance Bandwidth of a Wire Dipole with the Split-Coaxial Balun》.pdf
- 《Integrated Space-Time Finite Volume》.pdf
- 《Introducing_WCF_in_NET_Framework_4》.pdf
文档评论(0)