《ASME DETC 2016 Nano 2DOF》.pdf

Proceedings of the ASME 2011 International Design Engineering Technical Conferences Computers and Information in Engineering Conference IDETC/CIE 2011 August 29-31, 2011, Washington, DC, USA DETC2011-48619 DRAFT: A TWO DEGREE OF FREEDOM NANOPOSITIONER WITH ELECTROTHERMAL ACTUATOR FOR DECOUPLED MOTION 1 1 Yong-Sik Kim Nicholas G. Dagalakis 1 1 Intelligent Systems Division, National Institute of Intelligent Systems Division, National Institute of Standards and Technology, Standards and Technology, 100 Bureau Drive, Gaithersburg, MD, 20899-8230 100 Bureau Drive, Gaithersburg, MD, 20899-8230 2 Satyandra K. Gupta 2 Mechanical Engineering Department University of Maryland at Coll