《Modeling of cylindrical surrounding gate MOSFETs including the fringing field effects》.pdf
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《Modeling of cylindrical surrounding gate MOSFETs including the fringing field effects》.pdf
Vo1.34,No.7 JournaIofSemiconductors July2013
M odelingofcylindricalsurroundinggateM OSFETsincludingthefringlng
fieldeffects
SantoshK.Gupta1,十andSrimantaBaishya2
1DepartmentofElectronics CommunicationEngineering MotilalNehruNationalInstituteofTechnologyAllahabad,Uttar
,
Pradesh一211004,India
2DepartmentofElectronics CommunicationEngineeringNationalInstituteofTechnologySilchar,Assam 一788010,India
.
Abstract:A physicallybasedanalyticalmodelforsurfacepotentialandthresholdvoltageincludingtherfinging
gatecapacitancesincylindricalsurroundgate(CSG)M0SFETshasbeendeveloped.Basedonthisasubthresh—
olddraincurrentmodelhasalsobeenderived.Thismodelfirstcomputesthechargeinducedinthedrain/source
regionduetotherfingingcapacitancesandconsidersaneffectivechargedistributioninthecylindricallyextended
source/drainregionforthedevelopmentofasimpleandcompactmode1.Therfinginggatecapacitancestakeninto
accountareouterrfingecapacitance,innerrfingecapacitance,overlapcapacitance,andsidewal1capacitance.The
mode1hasbeenverifiedwiththedataextractedrfom 3D TCAD simulationsofCSGMOSFETsandwasfoundto
beworkingsatisfactorily.
Keywords:physicsbasedmodeling;source/drainextension(SDE);cylindricalsurroundinggate(CSG)MOS-
FETs;rfingingfield;surfacepotential;thresholdvoltage
DOI:10.1088/1674—4926/34/7/074001 PACC:7340Q;7360L
andthethresholdvoltagebasedontheparasiticcapacitance
1.Intr0ductiOn
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