《Modeling of cylindrical surrounding gate MOSFETs including the fringing field effects》.pdf

《Modeling of cylindrical surrounding gate MOSFETs including the fringing field effects》.pdf

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《Modeling of cylindrical surrounding gate MOSFETs including the fringing field effects》.pdf

Vo1.34,No.7 JournaIofSemiconductors July2013 M odelingofcylindricalsurroundinggateM OSFETsincludingthefringlng fieldeffects SantoshK.Gupta1,十andSrimantaBaishya2 1DepartmentofElectronics CommunicationEngineering MotilalNehruNationalInstituteofTechnologyAllahabad,Uttar , Pradesh一211004,India 2DepartmentofElectronics CommunicationEngineeringNationalInstituteofTechnologySilchar,Assam 一788010,India . Abstract:A physicallybasedanalyticalmodelforsurfacepotentialandthresholdvoltageincludingtherfinging gatecapacitancesincylindricalsurroundgate(CSG)M0SFETshasbeendeveloped.Basedonthisasubthresh— olddraincurrentmodelhasalsobeenderived.Thismodelfirstcomputesthechargeinducedinthedrain/source regionduetotherfingingcapacitancesandconsidersaneffectivechargedistributioninthecylindricallyextended source/drainregionforthedevelopmentofasimpleandcompactmode1.Therfinginggatecapacitancestakeninto accountareouterrfingecapacitance,innerrfingecapacitance,overlapcapacitance,andsidewal1capacitance.The mode1hasbeenverifiedwiththedataextractedrfom 3D TCAD simulationsofCSGMOSFETsandwasfoundto beworkingsatisfactorily. Keywords:physicsbasedmodeling;source/drainextension(SDE);cylindricalsurroundinggate(CSG)MOS- FETs;rfingingfield;surfacepotential;thresholdvoltage DOI:10.1088/1674—4926/34/7/074001 PACC:7340Q;7360L andthethresholdvoltagebasedontheparasiticcapacitance 1.Intr0ductiOn

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