Electrohydrodynamic jet printing of PZT thick film micro-scale structures》.pdf

Available online at ScienceDirect Journal of the European Ceramic Society 35 (2015) 3475–3483 Electrohydrodynamic jet printing of PZT thick film micro-scale structures D. Wang a,b , X. Zhu a , J. Liang a,b,∗, T. Ren a,b , W. Zha a , W. Dong c , S.A. Rocks d , R.A. Dorey e , Z. Xu a,b , X. Wang a,b a Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China b Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China c College of Electronic Science and Technology, Dalian University of Technology, Dalian 116024, China d Cranfield University, Bedfordshire MK43 0AL, UK e University of Surrey, Surrey GU2 7XH, UK Received 6 September 2014; received in revised form 6 May 2015; accepted 11 May 2015 Available online 8 June 2015 Abstract This paper reports the use of a printing technique, called electrohydrodynamic jet printing, for producing PZT thick film micro-scale structures without additional material removing processes. The PZT powder was ball-milled and the effect of milling time on the particle size was examined. This ball-milling process can significantly reduce the PZT particle size and help to prepare stable composite slurry suitable for the E-Jet printing. The PZT micro-scale structures with different features were produced. The PZT lines with different widths and separations were fabricated through the control of the