新型锁存射频微机械开关的设计和工艺研究.pdf

ofaNovelRFMEMS Switch andProcess Latching Design XingXianglong ProfessorJiaoliwei Directed Yuelm Wang by：Professor Abstract RF switchis switch Anovel shuntMEMS presented．The elec柱ostatic，capacitively ofthe membraneundercritical utilizesthe effect buckling clamped-clamped compressive isthatwhenthecontrol stresstorealize function．Thestructure’scharacteristic latching thestateoftheswitchisnot isremoved changed，i．e．，latching． voltage detailed oftheswitchis Fimt，the designprocedure presented．Thebuckling of membraneis element characteristic analyzed．Finite composite that increases withtheincreaseof betweenthe drivingvoltage exponentially gap and increaseswiththeincreaseof membraneand electrodesthat driving drivingvoltage 50Q is andthelosscharacteristicsare membranestress．The coplanarwaveguidedesigned modeloftheswitchis andthesimulation disenssed．Theelectrical given equivalent by is low ADSshowsthattheinsertionlossoftheswitch very andtheisolationis this