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ARTICLE
Received 27 Feb 2012 | Accepted 23 Jul 2012 | Published 21 Aug 2012 DOI: 10.1038/ncomms2018
High-mobility and low-power thin-film transistors
based on multilayer mos crystals
2
1,2 3 3 4 1 4
sunkook Kim , Aniruddha Konar , Wan-sik Hwang , Jong Hak Lee , Jiyoul Lee , Jaehyun Yang ,
1 4 4 1 1 1
Changhoon Jung , Hyoungsub Kim , Ji-Beom Yoo , Jae-Young Choi , Yong Wan Jin , sang Yoon Lee ,
3 1,5 1
Debdeep Jena , Woong Choi Kinam Kim
unlike graphene, the existence of bandgaps (1–2 eV) in the layered semiconductor molybdenum
disulphide, combined with mobility enhancement by dielectric engineering, offers an attractive
possibility of using single-layer molybdenum disulphide field-effect transistors in low-power
switching devices. However, the complicated process of fabricating single-layer molybdenum
disulphide with an additional high-k dielectric layer may significantly limit its compatibility
with commercial fabrication. Here we show the first comprehensive investigation of process-
friendly multilayer molybdenum disulphide field-effect transistors to demonstrate a compelling
case for their applications in thin-film transistors. our multilayer molybdenum disulphide
field-effect transistors exhibited high mobilities ( 100 cm2 V − 1 s − 1), near-ideal subthreshold
swings (~70 mV per decade) and robust current saturation over a large voltage window. With
simulations based on shockley’s long-channel transistor model and calculations of scattering
mechanisms, thes
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