mems知识详解.ppt

MEMS Basical Theories MEMS Basical Theories MEMS Basical Theories MEMS Basical Theories MEMS Basical Theories MEMS Basical Theories MEMS Basical Theories MEMS Basical Theories A: First developed in the 1970s B: Commercialized in the 1990s C: Integrated science after 2000 MEMS functions:Ｍake systems of all kinds to be 　Smaller, 　Faster, 　More energy-efficient , 　Less expensive. Commercial applications include: Inkjet printers, which use piezoelectrics or thermal bubble ejection to deposit ink on paper. Accelerometers in modern cars eg.airbag In consumer electronics devices such as game controllers, personal media players / cell phones (Apple iPhone) and a number of Digital Cameras . in PCs to park the hard disk head when free-fall is detected, to prevent damage and data loss. Silicon pressure sensors e.g. car tire pressure sensors, and disposable blood pressure sensors. Displays Optical switching Bio-MEMS Silicon Traditional:integrated circuits Material properties In single crystal form, silicon is an almost perfect Hookean material Service lifetimes: billion to trillions of cycles without breaking Polymers Much cheaper than silicon Characteristics Processes Metals No advantages displayed by silicon Electroplating, evaporation, and sputtering processes Microsensors : those devices that detect inform ation Actuators :those devices that can respond to in formation, or act 理论基础： 力的尺寸效应、 微结构的表面效应 微观摩擦机理等 因此有必要对微动力学、微流体力学、微热力学、微摩擦学、微光学和微结构学进行研究 技术基础： （1）设计与仿真技术； （2）材料与加工技术； （3）封装与装配技术； （4）测量与测试技术； （5）集成与系统技术等。 （1） Deposition processes ； （2） Photolithography； （3） Etching processes ； （4） Others； Processes for silicon: （1） Bulk micromachining； （2） Surface micromachining ； （3） LIGA (Abbreviation of Lithograph Galvanfo rmung and Abformug) ； （4） Others； 1