条形和脊型SOI波导微环结构传感性能的研究.pdfVIP

第44 卷第2 期 红外与激光工程 2015 年2 月 Vol.44 No.2 Infrared and Laser Engineering Feb.2015 Investigation on the sensing performances of strip and rib SOI waveguides microring structures Deng Lili1,2, Shi Qiang1,2, Zhang Hui1,2 , Duan Qianqian1,2, Jian Aoqun1,2, Sang Shengbo1,2, Zhang Wendong1,2 (1. MicroNano System Research Center, Taiyuan University of Technology , Taiyuan 030024, China; 2. Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan 030024, China) Abstract: The strip and rib waveguides based on silicon on insulator (SOI) microring resonator structures are investigated by the Finite Difference Time Domain (FDTD) method. The theory of microring resonators used in biosensing was explored. The effects of geometric structure dimension on biosensor sensitivity were considered and analyzed . It is demonstrated that the sensitivity of strip waveguide is much higher than that of rib waveguide , which is proved by their mode field distributions, and the sensitivity coefficients of both strip and rib waveguides have the similar trend with the increase of waveguide width. Furthermore, the strip waveguide has the highest sensitivity coefficient when the cross section is square, whereas that of rib waveguide corresponds to a not totally symmetrical geometry . The maximum