第4章-表面分析手段1-SEM.ppt

BEA Confidential. | * BEA Confidential. | * BEA Confidential. | * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * * * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * BEA Confidential * * * 4.1 Scanning electron microscopyBSE vs SE SE produces higher resolution images than BSE 二次电子提供更高分辨率 By placing the secondary electron detector inside the lens, mainly SE are detected Resolution of 1 – 2 nm is possible BEA Confidential. | * 二次电子 背散射电子 4.1 Scanning electron microscopyX-rays Photons not electrons 光子而非电子 Each element has a fingerprint X-ray signal 每种元素都有X光信号指纹。（元素定性定量分析） Poorer spatial resolution than BSE and SE 分辨率差 4.1 Scanning electron microscopyX-rays Relatively few X-ray signals are emitted and the detector is inefficient X射线信号相对较少 relatively long signal collecting times are needed 采集时间长 4.1 Scanning electron microscopyX-rays Most common spectrometer: EDS (energy-dispersive spectrometer) 最常用光谱仪EDS Signal overlap can be a problem 信号重叠 Fig. 2 EDS graphic of uncoated AZ91 magnesium alloy. Hikmet Altun , Hakan Sinici Corrosion behaviour of magnesium alloys coated with TiN by cathodic arc deposition in NaCl and Na2SO4 solutions Materials Characterization, Volume 59, Issue 3, 2008, 266 - 270 /10.1016/j.matchar.2007.01.004 Fig. 3 EDS graphic of TiN coated AZ91 magnesium alloy. Hikmet Altun , Hakan Sinici Corrosion behaviour of magnesium alloys coated with TiN by cathodic arc deposition in NaCl and Na2SO4 solutions Materials Characterization, Volume 59, Issue 3, 2008, 266 - 270 /10.1016/j.matchar.2007.01.004 4.1 Scanning electron microscopyX-rays We can analyze our sample in different modes 模式多 chemical concentrati