FEMAG晶体生长仿真软件--Numerical_Simulation_of_Bulk_Crystal_Growth_for_Industrial_Application.ppt

* * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * FEMAGSoft ? 2013 Rs 5.1 cm, Rf 4.7 cm, Ws 10 rpm, Wf -15 rpm vpul 3.4 mm/min Streamlines 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Rs 5.1 cm, Rf 4.7 cm, Ws 10 rpm, Wf -15 rpm vpul 3.4 mm/min Difference of interstitial and vacancy concentrations CI - CV 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Rs 5.1 cm, Rf 4.7 cm, Ws 10 rpm, Wf -15 rpm vpul 3.4 mm/min Difference of interstitial and vacancy concentrations CI - CV detail 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 von Mises invariant: global view and detail Ratio of the von Mises invariant over the CRSS 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Calculation of thermal stresses in a growing FZ crystal without convection 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Effect of a heat shield: temperature field No convection, Rs 5.1 cm, Rf 4.7 cm, vpul 3.4 mm/min a Without heat shield b With a heat shield 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Effect of a heat shield: von Mises stress a b 1, 0, 0 growth orientation 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 a b 1, 1, 1 growth orientation Effect of a heat shield: von Mises stress 6. Modeling of FZ growth cont’d Typical FEMAG-FZ global unstructured mesh for heat transfer and induction heating FEMAGSoft ? 2013 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 FEMAG-FZ time-dependent simulation of the growth of a silicon crystal Use of an equivalent thermal conductivity 6. Modeling of FZ growth cont’d Free interface constraining loci secondary mesh in FZ growth FEMAGSoft ? 2013 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Inverse modeling in FZ growth much more difficult problem than in Cz growth can lead to misleading interpretations of the simulation results since completely inverse models result in the calculation of the melt volume and hence parametric studies are difficult to interpret with classical simp