全球半导体晶体生长计算著名商业软件FEMAG_Numerical Simulation of Crystal Growth for Application.ppt

FEMAGSoft ? 2013 No Marangoni convection With Marangoni convection Equivalent axisymmetric calculations 4. DS process simulation cont’d FEMAGSoft ? 2013 3D FEM-spectral calculations 3D effect of Marangoni convection 4. DS process simulation cont’d Sapphire growth simulation FEMAGSoft ? 2013 5. Sapphire growth FEMAGSoft ? 2013 Steel pulling axis Sapphire Iridium crucible Zirconium oxide Zirconium oxide granules Quartz Simulation of sapphire crystal growth by the Czochralski method Furnace model 5. Sapphire growth cont’d FEMAGSoft ? 2013 Melt meshes BLM boundary layer mesh Coarse mesh 5. Sapphire growth cont’d FEMAGSoft ? 2013 Local temperature field Result using coarse mesh Result using BLM mesh Results for 20 cm crystal length 5. Sapphire growth cont’d FEMAGSoft ? 2013 Velocity field Result using coarse mesh Result using BLM mesh 5. Sapphire growth cont’d FEMAGSoft ? 2013 Global temperature field FEMAG-CZ quasi-steady simulation of the growth of an HEM Sapphire crystal 5. Sapphire growth cont’d FEMAGSoft ? 2013 c-grown crystal a-grown crystal von Mises invariant isovalues Pa 5. Sapphire growth cont’d FEMAGSoft ? 2013 How to extend Cz modeling techniques to FZ growth? 6. Modeling of FZ growth FEMAGSoft ? 2013 Global temperature field left , melt flow right , and alternating magnetic field bottom Quasi-steady simulation of the Floating Zone FZ growth of a 100 mm silicon crystal 1mm/min pull rate 6. Modeling of FZ growth cont’d Turbulent viscosity is low and the melt flow can be computed by means of a laminar model. FEMAGSoft ? 2013 6. Modeling of FZ growth cont’d Induction heating FEMAGSoft ? 2013 6. Modeling of FZ growth cont’d Induction Heating in FZ semi-conductor growth FEMAGSoft ? 2013 Jsource Jeddy J current density Jsource imposed by external source Jeddy induced by time-dependent magnetic field inductor susceptor 6. Modeling of FZ growth cont’d Slottedinductor Top view Section S-S’ Outer boundary Inner boundary n s