含铁与铜之中孔洞分子筛触媒处理丙酮挥发性有机物之研究.doc

使用含鐵與銅之中孔洞分子篩觸媒處理廢氣中丙酮之研究 1. 曾毓翎 2.黃登瑋 3.張章堂 4.馬志明 1. (宜蘭大學環境工程學系(所) 學生，宜蘭) 2. (宜蘭大學環境工程學系研究所碩士班學生，宜蘭) 3. (宜蘭大學環境工程學系(所)教授，宜蘭) 4. (聖母醫護管理專科學校化妝品應用與管理科助理教授，宜蘭) (聖母醫護管理專科學校化妝品應用與管理科助理教授，宜蘭) 摘 要：現今的高科技半導體產業已成為我國主要之經濟產業，並於半導體製程（如微影、蝕刻、擴散、蒸鍍）、機台的維修及保養作業會使用到大量的揮發性有機化合物(Volatile Organic Compounds, VOCs)，如醇類、酮類、烴類、醚類、鹵化烴等。其中以酮類中之丙酮應用範圍最廣，當丙酮經由吸入方式大量進入人體時會導致中樞神經受抑制、噁心嘔吐、情節嚴重時甚至導致休克。本研究是利用溶膠-凝膠法製備中孔洞觸媒載體，並添加FeCu進行表面修飾，製備出Fe-MCM-41Cu-MCM-41觸媒，並進一步探討自製觸媒之丙酮處理效率。本研究先藉由PXRD、B.E.T與SEM-EDS等儀器進行材料特性分析鑑定觸媒之物理化學特性，其結果藉由PXRD鑑定證明觸媒具六方對稱結構並於2θ為2.3°、4.1°與4.8°有繞射峰存在其所代表的晶面分別為(100)、(110)、(200)晶面；BET比表面積則介於1079 ~ 1465 m2 g-1之間，平均孔洞大小則是介於3252?, 物理吸附/脫附曲線屬於典型的Type Ⅳ曲線(中孔洞)；最後經SEM-EDS觀察其外觀均呈現圓柱狀排列。本研究另行針對反應溫度空間流速等操作參數對熱解效率之影響進行探討。關鍵字：揮發性有機物；丙酮；溶膠-凝膠法；中孔洞觸媒Study on the Acetone Removal in the Waste Gas with Prepared Iron and Copper Doped Mesoporous Catalysts 1. Tseng Yu Ling 2. Huang Deng Wei 3. Chang Chang Tang 4. Ma Chih Ming 5.Chen Hua Wei 1. (Department of Environmental Engineering, Ilan University, Student，) 2. (Department of Environmental Engineering, Ilan University, Student，) 3. ( Department of Environmental Engineering, Ilan University, Professor，) 4. (Department of Cosmetic Application Management, St. Marys Medicine Nursing And Management College, assistant professor, Ilan) 5. (Department of Cosmetic Application Management, St. Marys Medicine Nursing And Management College, assistant professor, Ilan) Abstract The high-tech semiconductor industry has became the major economic sources recently in our country. Furthermore, a large amount of volatile organic compounds (VOCs) are emitted from the machine repair, the maintenance work and semiconductor manufacturing processes, including lithography, etching, diffusion, deposition. The composition of VOCs includes alcohols, ketones, hydrocarbons, ethers, halogenated hydrocarbons, etc. Among ketones, acetone is used broadly and easily results in inhibiting central nervous system, throwing up, and feeling nausea by