激光加工聚合物微流道暂态弹性热应力分析.pdf

第19卷第5期 传感技术学报 v01．19No．5 CHINESE OFSENSORSANDACTUATORS 2006年10月 JOURNAL Oct．2006 TransientElasticThermalStress forLaser Analysis MachinhgPolymer XIANG Zi—chen Heng—fu’，FU Jian-zhong，CHEN (Mechanical researchand 310027，China) engineeringDept．Microsystemdevelopmentcenter，ZhejiangUniversity，Hangzhou Abstract：Lasersare asavaluabletoolfor micro emerging direct—writingpolymer the in heatfluxratesthatallowthelaserto ablation alsoresult large，concentrated efficientlypolymer localizedthermalstressesina small can micro- large heat-affectedzone．thenthermalstressesleadtO decreasein and orderto cracks，a life，and failure．In where， strengthfatigue possiblycatastrophic predict whatstressesoccur laser three-dimensionalelasticstressmodelhasbeenin— when，and duringgrooving，a intoablation solution the fieldsandthereero— tegrated solution．First，the predictstemporaltemperature sion the and field，theelasticstressfieldsarecalculat— surface．Then，usinggroovedgeometrytemperature edas and thelaserablation resultsofthe showelastic theydevelopdecayduring process．The analysis thermalstresses overathick belowand tOthe bethe of