薄膜工序标准化作业0816-1.docx

薄膜标准化作业流程Thin film standard operation process每日上班前准备工作A day before work to prepare for work序号Serial number名称Name步骤Step图示Icon1第一时间查看交接班记录，确认交班人员是否有重要的事情交接The first time to see the log, confirm whether there are important things to shift personnel transfer 薄膜工序的机台异常情况； 薄膜工序安全状况；生产完成状况，是否有遗留待处理备注信息涉及较为重要的事项； 1) the abnormal situation of the film process; 2) film process safety status; 3) production status, whether there is a legacy left to deal with 4) note information to the more important issues; 2上班前使用干净无尘布沾酒精或IPA对工序工装、桌台、货架、推车进行清洁，做好6S。Before going to work, the use of clean cloth stained with alcohol or IPA on the working process, table, shelves, carts clean, do a good job 6S. 在二更拿取已清洗无尘布 在防爆柜领取酒精或IPA填写化学品领用记录按照从上之下，从里到外的原则对工装、器具、货架、推车等进行卫生清洁 清洁完毕后将无尘布放入待清洗盒中，领用的酒精或IPA放回防爆柜中，并更换干净手套。1) cleaning clean cloth in two to take more 2) in the explosion proof cabinet to receive the alcohol or IPA 3) fill in the record of the chemicals 4) according to the above, from the inside to the outside of the principle of equipment, equipment, shelves, carts and other sanitary cleaning 5) after cleaning, clean cloth in the box to be cleaned, and bring the alcohol or IPA back into the explosion-proof cabinet, and replace the clean gloves作业前确认事项 Confirmation before work 序号Serial number名称Name步骤Step图示Icon1核对本工序所有的机台状态牌是否与MES机台状态一致Check the status of all the machines in this process is consistent with the status of the MES machine 登录MES个人账户，进入机台管理中，选择薄膜区模组，点击查询即可。对薄膜工序所有的机台状态牌与MES系统中的机台状态进行核对，确认一致后方可流片。1) login MES personal account, into the machine management, select the film area module, click the query can be. 2) of state machine state licensing and MES system in the film process all check, confirm the agreement before can be taped.2填写作业前准备确认表Fill in the confirmation form 核对无误后，依照薄膜工序作业前准备确认表的要求进行填写After the check is correct, according to the requirements of the film process before the operation to prepare the confirmation form to fill in 机台监控及机台操作流程 Machine monitoring and operation pr