Contactless 360° absolute angular CMOS microsystem based on vertical Hall sensors.pdfVIP

下载本文档

9
0
约2.43万字
约 6页
2017-04-06 发布于江苏
举报
版权申诉

Contactless 360° absolute angular CMOS microsystem based on vertical Hall sensors.pdf

1、有哪些信誉好的足球投注网站（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

Contactless 360° absolute angular CMOS microsystem based on vertical Hall sensors

Sensors and Actuators A 116 (2004) 39–44 Contactless 360 ? absolute angular CMOS microsystem based on vertical Hall sensors Michel Demierre a,? , Enrico Schurig a , Christian Schott b , Pierre-André Besse a , Radivoje S. Popovic? a a Swiss Federal Institute of Technology, Institute of Microelectronics and Microsystems, CH-1015 Lausanne, Switzerland b SENTRON AG, CH-6300 Zug, Switzerland Received 28 April 2003; received in revised form 15 March 2004; accepted 18 March 2004 Available online 10 May 2004 Abstract We have developed the first 360 ? contactless absolute angular microsystem using a CMOS two-dimensional vertical Hall sensor. The microsystem contains two groups of vertical Hall sensors, mutually oriented at 90 ? , and complete readout electronics. The spinning current method is used to extract the signals from the sensors. Projections onto two orthogonal axes of the external rotating magnetic field give the rotation angle sine and cosine functions, respectively. From these two output signals, the rotation angle is extracted using the four quadrant inverse tangent function without discontinuity or dead angle over 360 ? . An angular accuracy of less than ±0.5?(±0.14%) at room temperature with only the Hall sensors’ residual offset compensation is obtained. Using gain mismatch and phase compensation, an outstanding accuracy of ±0.17?(±0.05%) is achieved. ? 2004 Elsevier B.V. All rights reserved. Keywords: Hall; Vertical; CMOS; Magnetic sensors; Angular; Contactless 1. Introduction Angular sensors are widely used in automotive, indus- trial, and consumer applications. They are based on various principles, including mechanical, resistive, optical, capaci- tive, inductive, and magnetic [1]. Magnetic angular sensors have the advantages of contactless measurement, reliability in harsh environments and low cost. Two magnetoresistances such as AMR [2] and GMR [3] placed orthogonally were used for contactless 360 ? angle measurement. This technology is unfortunately not