Visual Inspection Semi Standard.pdf

SEMI F81-1103 ? SEMI 2003 1 SEMI F81-1103 SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on September 3, 2003. Initially available at October 2003; to be published November 2003. 1 Purpose 1.1 The purpose of this specification is to provide visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. These criteria are meant to ensure that welds are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications. 2 Scope 2.1 This specification defines inspection and acceptance criteria for GTA autogenous butt joint welds of stainless steel and other CRAs in fluid distribution systems. The fluid distribution system includes tubing, pipe, fittings, valves, subassemblies and components that contain and distribute fluid. NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 The stainless steels covered by this specification are limited to the austenitic and superaustenitic grades of stainless steel. 3.2 Corrosion resistant metals and alloys covered by this specification are limited to solid solution grades of nickel alloys and solid solution grades of titanium alloys. 3.3 This specificat