多级粗糙间隙内的两相微流动数值模拟.PDFVIP

第 47 卷第 15 期 机 械 工 程 学 报 Vol.47 No.15 2011 年 8 月 JOURNAL OF MECHANICAL ENGINEERING Aug. 2 0 1 1 DOI：10.3901/JME.2011.15.083 多级粗糙间隙内的两相微流动数值模拟* 周 平 郭东明 康仁科 金洙吉 (大连理工大学精密与特种加工教育部重点实验室 大连 116024) 摘要：以带沟槽抛光垫多级粗糙间隙内的固液两相微流动为研究对象，基于计算机模拟生成多级粗糙表面，利用格子 Boltzmman 方法(Lattice Boltzmann method, LBM)计算微观流场，对抛光液在多级粗糙间隙内的流动过程以及固体颗粒的运动 轨迹进行分析。探讨将这种新的抛光液两相微流动分析方法用于平坦化机理研究的可行性，并初步研究固体颗粒在多级粗糙 间隙内的运动和碰撞过程，分析固体颗粒的运动特性。研究表明，多级粗糙表面的计算机模拟生成技术结合稀疏两相流模拟 可以用来分析多级粗糙间隙内抛光液流动和固体颗粒运动轨迹。通过对抛光垫多级粗糙间隙内两相微流动的研究，有助于揭 示晶片表面缺陷产生的机制，并提出减少缺陷的抛光垫微结构设计及修整方案。 关键词：化学机械平坦化 粗糙表面 两相微流动 中图分类号：TN305 O351 Numerical Simulation of Micro Two-phase flow in Multilevel Rough Gap ZHOU Ping GUO Dongming KANG Renke JIN Zhuji (Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024) Abstract：Solid-liquid two-phase micro flow in multilevel rough gap between the grooved pad and wafer is taken as a study object. Lattice Boltzmann method (LBM) is used to analyze the slurry flow in the multilevel rough gap combining with the computer generation technology of rough surface, and then, the trajectories of the solid particles in the slurry are simulated. The feasibility of this new approach, which offers detailed images of flow in planarization process and trajectories of particles, is demonstrated. The motion and collision of solid particles in the multilevel rough gap are studied preliminarily. The results show that this new approach, a combination of the computer generation of multilevel rough surface and the simulation of dilute two-phase flow, is successful in the simulation of slurry flow and particles motion in multilevel rough gap. The research