!!Large-area submicron replica molding of porous low-k dielectric films and application to photonic.pdfVIP

下载本文档

5
0
约1.97万字
约 6页
2017-04-13 发布于江苏
举报
版权申诉

!!Large-area submicron replica molding of porous low-k dielectric films and application to photonic.pdf

1、有哪些信誉好的足球投注网站（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

!!Large-area submicron replica molding of porous low-k dielectric films and application to photonic

/locate/mee Microelectronic Engineering 84 (2007) 603–608Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication Ian D. Block, Leo L. Chan, Brian T. Cunningham * Nano Sensors Group, University of Illinois at Urbana-Champaign, 208 N. Wright St, Urbana, IL 61801, USA Received 13 February 2006; received in revised form 14 December 2006; accepted 14 December 2006 Available online 16 January 2007Abstract We demonstrate a replica-molding method for submicron patterning of a low-index sol–gel nanoporous glass for the purpose of fab- ricating large-area (80 cm2) label-free photonic crystal optical biosensors. Scanning electron micrographs show the sol–gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach is described in which the photonic crystal optical resonance is used to accurately and quickly characterize the geometrical and material property uniformity over a large area. Uniformity within 1% was mea- sured over an 80 cm2 area. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics. 2006 Elsevier B.V. All rights reserved. Keywords: Low-k; Replica molding; Optical biosensor; Sol–gel glass1. Introduction Imprint lithography and nanoreplication methods are emerging as important techniques for imparting submicron features to a wide array of devices. In comparison to pho- tolithography, and to a greater extent e-beam lithography, these methods provide higher throughput, lower cost, decreased processing complexity and equipment require- ments, and the ability to directly pattern a large variety of materials [1]. This approach has previously been used to successfully mold sol–gel glass precursors into diffractive optical elements, len