GTW3-5200U安装手册.docVIP

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GTW3-5200U安装手册.doc

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GTW3-5200U安装手册

GTW3-5200U安装手册 Confidential GTWⅢ－5200U 安装要领书 GTWIII安装要领书 BQN-G-14355-H 1/55 Confidential目录 1．加工机、发振器的安装······················································P3 2．加工机的启动····································································P7 3．Camera安装角度调整······················································P10 4．功率传感器调整（零点调整）···········································P11 5．测高器调整········································································P12 6．Galvano安装····································································P13 7．冷却装置的启动·································································P14 8．发振器的启动····································································P17 9．Z轴补偿············································································P20 10．光路调整··········································································P22 11． Fθ透镜的安装······························································P35 12．加工机外罩（外壳）的安装·············································P36 13．排气导管的安装·······························································P36 14．Camera偏置调整····························································P37 （1）L侧偏置调整（调整MaskNo.1）（2）R侧偏置调整 15．焦点调整··········································································P39 （1）焦点位置调整（2）确认Power Sensor的中心位置（3）MaskNo.2～11的调整（4）左右能量平衡调整（5）确认功率传感器误差（6）调整Galvano补偿条件、对焦条件的准直透镜 16．Galvano补偿···································································P42 （1）输入放大器调整（2）prgmake 制作（3）M340Galvano补偿的执行（4）实施准备画面的Galvano补偿、对焦2 17．确认脉冲监控功能···························································P44 18．确认圆整度测量、焦点裕度·············································P45 19．频率（周波数）特性试验·················································P46 20．XY加工台补偿································································P47 21．其他················