AFM微悬臂梁探针弹性常数各种标定方法的比较与分析.pdfVIP

第28卷 第8期 传 感 技 术 学 报 V01．28 No．8 2015年 8月 CHINESEJOURNALOFSENSORSANDACTUATORS Aug．2015 ComparisonandAnalysisofDifferentM ethodsinCalibrationofthe SpringConstantofAFM CantileverProbes SONGYunpeng，WUSen ，FUXing，XULinyan (StateKeyLaboratoryoJ’PrecisionMeasuringTechnologyandInstruments，TianjinUniversity，Tianjin300072，China) Abstract：Micro—cantileverprobeisanimportantforcesensorinatomicforcemicroscope(AFM)basedmicro—ornano· Newtonforcemeasurement．Theaccuracyofthespringconstantisofgreatsignificancetothereliabilityoftheforce measurementresult．Atpresent，manycalibrationmethodshavebeenproposed，buteverymethodhasits’limitations， andtheaccuracyofeachmethodisdifferent．So，thecomparisonofdifferentmethodiSneededtomakeachoiceofwhich methodiSthebestone．Thenormalspringconstantofthreekindsofcommercialcantileversarecalibratedwiththe traceablespringconstantcalibrationsystem builtinourlaboratory．Thecalibrationprincipleisbasedonbalancemethod． Thenthreeothercalibrationmethodsfthedimensionalmethod，theSadermethod，andthethermalnoisemethod)areused tocalibratethetestcantileversagain．Wecomparedthecalibrationresultsofdifferentmethodsanddiscussedthe advantagesandshortcomingsofeachmethodindetail．Theanalysisresultsindicatethatincomparisonwithothermethods， thebalancemethodhaswiderapplicationrange，higheraccuracyandtraceabilitytoSI．Itcanbecomeoneofthebest methodsincalibrationofthespringconstantofvariouscantileversaccurately． Keywords：micro-cantilever；atomicforcemicroscope；normalspringconstant；calibration EEACC：7230 doi：10．39690．issn．1004-1699．2015．08．011 AFM微悬臂梁探针弹性常数各种标定方法的 比较与分析 宋云鹏，吴 森 ，傅 星，徐临燕 (天津大学精密测试技术及仪器国家重点实验室，天津 300072) 摘 要 ：微悬臂梁探针是基于原子力显微镜fAFM)的微纳尺度力学测试中重要的力传感元件，其弹性常数的准确程度直接影 响力学测量结果的可靠性。但是，目前已有的众多标定微悬臂梁探针弹性常数的方法都有各 自的局限性 ，且准确性各异，因此需