三维共聚焦表面形貌仪PhaseShiftMicroXAM-3D.PDF

三维共聚焦表面形貌仪 PhaseShiftMicroXAM-3D 用于测量表面粗糙度、精加工表面纹理，测量范围从高度 抛光的光学件直至粗糙表面；如：扎制的钢材、塑料、纸 张、陶瓷和硅晶片等。 备有光学显微镜及不同目镜；高分辨率的摄像机可自动调 焦测出752×480个数据点。 使用光学干涉法进行定量测量，可采用目视和共焦两种模 式操作。 使用所提供的绘图和分析软件，可获得优化表面纹理图像， 并生成三维干涉断面图。 3 Dimensional Confocal Microscope Phase Shift MicroXAM-3D MicroXAM-3D can measure the surface profile and surface roughness of polished optical elements and rough metal surfaces, 分辨率 752×480像素（可选1K×1K） such as the milled steel, plastics, ceramics and the silicon disks. XYZ行程 100mm×100mm×100mm RMS重复精度 1nm The surface patterns and the 3D interference cross section 垂直扫描范围 30um 100um 5mm10mm figures can be acquired by the provided graphic and analysis 垂直扫描分辨率 最小可到0.01nm tools. The optical interference method is used to achieve 数据采集速度 标准型：2.1um/sec. quantitative measurement, visual and confocal modes are both 侧向分辨率 0.11-8.8um provided. 视场范围 8mm×10mm-0.084mm×0.063mm Optical microscope and different eyepieces are provided. 校正精度 0.1% 752 ×480 data can be acquired by automatic focusing in high 反射率要求 1%—100% precision camera.