V含量对ZrVCN薄膜微结构及力学性能与摩擦性能的影响.pdfVIP

学兔兔 第 18卷第6期 粉末冶金材料科学与工程 2013年 12月 、，01 18No．6 Materials Science and Engineering of Powder Metallurgy Dec．2013 V含量对ZrVCN薄膜微结构及力学性能 与摩擦性能的影响 马冰洋，喻利花，许俊华 (江苏科技大学 材料科学与工程学院，镇江 2 12003) 摘 要：采用非平衡磁控溅射法制备不同v含量的ZrVCN复合薄膜，利用能谱分析、x射线衍射以及纳米压痕 仪与摩擦磨损仪等研究V含量对薄膜的成分、微结构、硬度与摩擦性能的影响。结果表明，ZrVCN复合膜呈现 fcc结构，V的加入使薄膜衍射峰升高并变得尖锐，随V含量增加衍射峰向大角度方向偏移。随v含量增加，薄 膜硬度先增加后降低，V与zr的原子比n(V)／n(Zr)为0．31的薄膜硬度最高，为33．1 GPa。薄膜的室温摩擦性能和 700℃下的摩擦性能均随V含量增加而提高。n(V)／n(Zr)为0．69的ZrVCN薄膜在具有高硬度(26．3 GPa)的同时兼 具良好的室温和高温摩擦性能，其室温和700℃高温下的摩擦因数分别为0．40和0．48。 关键词：ZrVCN薄膜；微结构；力学性能；摩擦性能；Magn61i相 中图分类号：TQ174 文献标识码：A 文章编号：1673 0224(2013)6．0869．05 Influence of V on micr0structure，mechanical and tribological properties of ZrVCN composite film MA Bing—yang，YU Li—hua，XU Jun—hua (Materials Science and Engineering，Jiangsu University of Science and Technology,Zhenjiang 212003，China) Abstract：ZrVCN thin films with different V contents were deposited by reactive unbalanced magnetron sputtering，their microstructure，mechanical and tribological properties were investigated by XRD，nanoindentation and tribometer．The results indicate that ZrVCN min films have a fcc crystal structure and the intensities of diffraction peaks become more higher and sharper after V addition．With increasing V content．the hardness of ZrVCN thin films increases at first then decreases rapidly．The hardness of ZrvCN thin film achieves the maximum value of 33．1 GPa when V／Zr iS 0．31．The friction coefficient of the films increases with increasing V content at room temperature．An