原子力显微镜测量Metrology WYKO and AFM.ppt

* Page * SPME - CONFIDENTIAL * Page * SPME - CONFIDENTIAL WYKO AFM Introduction SPME-Metrology April, 2007 The WYKO surface profiler systems are non-contact, non-contaminating optical profilers that use two technologies to measure a wide range of surface heights. Phase-shifting interferometry (PSI) mode allows you to measure smooth surfaces, while vertical-scanning interferometry (VSI) mode allows you to measure rough surfaces and steps. HD2000 HD3300 HD8000 WYKO Definition Measurement Mode Define Range Resolution Surface Type Measure Item PSI Phase-Shifting Interferometry 160nm 0.3nm Smooth Profile/PTR VSI Vertical Scanning Interferometry 500um 3nm Rough Ramp Profile Definition 1 AAB Option (Advanced Air Bearing Analysis option): Nominal slider length and width instead the measured slider ABS dimension to calculate related items. 2 Mag_H Option (Magnetic Head Analysis option): Actual ABS dimension to calculate the related items. 1.Crown and Cross Crown The Crown for each rail is defined as the peak-to-valley difference for the fitted cylinder in slider length direction after tilt is removed. And in width direction is Cross Crown. A B C D A: Actual rail profile B: All valid data points are replaces with the cylindrical fit C: Slider with tilt (Maybe due to the large twist) D: Slider with tilt removed 2.Twist Twist describes the distortion between the rails along their length. Twist Angle is the acute angle formed by the intersection of the planes fitted to the left and right rails as measured in the Y-Z plane. Twist Height indicates roughly how far any one corner of the slider is above or below the other three corners. Leading Edge Trailing Edge Inner Outer Profile Analysis Items Negative Crown Positive Crown 3.PTR (Pole Tip Recession) Item P