Introduction to MEMS Resonator课件.ppt

Introduction to MEMS Resonator JB Dai;MEMS vs. Quartz Oscillators MEMS Resonator分类 SiTime Resonator的典型制造工艺 Circuits for MEMS Resonator Oscillators An Example of 60MHz MEMS Oscillators ;MEMS vs. Quartz Oscillators ;MEMS振荡器生产工艺 与传统石英振荡器截然不同，MEMS振荡器采用了全硅的产品结构，有一个全硅MEMS谐振器和一个可编程Analog CMOS驱动芯片堆栈，并以标准QFN IC封装方式完成。与传统石英相比，全硅MEMS振荡器不管从生产工艺还是组件设计结构上，都更符合现代电子产品的标准，也是对传统石英产品的升级换代。 1.高性能模拟温补技术使全硅MEMS振荡器具有优秀的全温频率稳定性，彻底解除温飘问题； 2.可编程的平台为系统设计和缩短新产品开发周期提供必要的灵活性； 3.完善的半导体生产链可让全硅MEMS供货期全面缩短，并提升需求应急的能力； 4.全自动生产的IC结构在质量和可靠性方面有无可置疑的优良的一致性。 ;MEMS vs. Quartz Oscillators （cont.);温度特性对比;主要规格参数对比;MEMS vs. Quartz Oscillators （cont.);MEMS vs. Quartz Oscillators （cont.);可靠性和耐用性;电学参数对比;MEMS Resonator分类;MEMS Resonator分类(cont.);Beams Resonator(cont.) ;A hybrid mode resonator-- I-shaped Bulk Acoustic Resonator (IBAR) The structure resonates predominantly in a lateral extensional mode. Large flanges are placed at the ends of the extensional beams for increasing the capacitive transduction area. So, the device can hence be described as a hybrid mode resonator. ;I-shaped Bulk Acoustic Resonator (IBAR)(cont.) ;purely extensional mode resonators-- Silicon Bulk Acoustic Resonator (SiBAR) The SiBAR is a monolithic single crystal silicon extensional mode resonator that vibrates in the plane of the substrate. So, the device can hence be described as a purely extensional mode resonators.;Silicon Bulk Acoustic Resonator (SiBAR) (cont.) ;SiTime Resonator的典型制造工艺;SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);SiTime Resonator的典型制造工艺(cont.);Circuits for MEMS Resonator Oscillators ;Circuits for MEMS Resonator Oscillators (cont.);Sustaining Amplifier ;Level Control ;Resonator Biasing ;60-MHz Wine-Glass Micromechanical-Disk Reference Oscillator;An Example of 60MHz MEMS Oscillators(cont.);An Example of 60MHz MEMS Oscillators(