表面粗糙度测量方法综述77335.pdf

26 5 Vol. 26, No. 5 2004 10 OPTICA L INSTRU MENT S October, 2004 : 1005-5630( 2004) 04-0054-05 表面粗糙度测量方法综述 刘　斌, 冯其波, 匡萃方 ( , 100044) : 表面粗糙度是机械加工中描述表面微观形貌非常重要的 个参数, 表面粗糙度 测量技术是现代精密测试计量技术的 个重要组成部分。综述了接触式和非接触式两类测 量方法, 着重介绍了非接触式测量中的几种测量方法的测量原理及其优缺点。 : 表面粗糙度; 接触式测量; 非接触式测量 : T G84; T H74: A Survey of measurement methods for surface roughness L I U B in, FE N G Qi-bo, K UA N G Cui -f ang ( , , 100044, ) Department of Ph sics Beijing Jiaotong Universit Beijing China : - Abstract Surface r oughness is an important parameter to reflect the micro geometr in machine pr ocess, and also an important part of modern precise measurement technique. Contact measurement and noncontact measur ement was summar ized in this paper , and the advantages and disadvantages are disucssed. Some ideas about it s trend are given in the end. Key words : surface roughness; contact-mesurement; noncontact-measurement 1 , , , 70 , , : [ 1] [ 2] [ 2, 3] [ 2] [ 37] [ 2, 3, 8, 9] ; [ 10] [ 1113] [ 14, 15] [ 16] AFM 2 , , : 2003-12-08 : ( 1979-) , , , , 5 : 55 2. 1 , ; , 2. 2 , , , , , , 2. 3 , ( )