非刚性核-壳结构PSCeO2复合微球的可控合成及其性能研究.pdfVIP

ABSTRACT PS microspheres were prepared by soap-free emulsion polymerization method. Core-shell structured PS/CeO2 composite microspheres were synthesized by chemical vapor deposition process using cerium nitrate and hexamethylene tetramine as staring materials. The microstructures of the as-prepared composite microspheres were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), field emission scanning electron microscopy (FESEM), dynamic light scattering (DLS), Fourier transform infrared spectroscopy (FT-IR) and thermal gravimetric analysis (TGA). Silicon dioxide dielectric layer were polished using PS/CeO2 microspheres as abrasives. The topmorphologies, surface roughness, surface profile curve were charactered and analysized by AFM. The effects of the microstructure of composite abrasives on CMP performance were discussed. The Young’s modulus of PS microspheres and PS/CeO2 composite microspheres were calculated by Hertz theory on the basis of AFM force-displacement curves. Main results were as follows: (1) The as-prepared PS microspheres were monodispersed and the particle sizes of PS microspheres were about 120, 170, 220 and 250 nm. The particle size of the PS/CeO2 composite microspheres were about 130-150, 180-200, 230-250 and 260-280 nm and the PS particle was uniformily coated by CeO2 (about 6-16 nm). The influerence of the microstructure of composite abrasives were regulated and controlled by transforming the process parameters of liquid-phase synthesis. (2) The surface of silica dielectric layers was flat and had lower roughness after polished b