一种射频体声波滤波器的版图设计与仿真.PDFVIP

第 8 卷 第 6 期 信 息 与 电 子 工 程 Vo1．8，No．6 2010 年 12 月 INFORMATION AND ELECTRONIC ENGINEERING Dec．，2010 文章编号：1672-2892(2010)06-0712-05 一种射频体声波滤波器的版图设计与仿真 顾 立，钟 毅 (武汉理工大学 信息工程学院，湖北 武汉 430070) 摘 要：射频体声波滤波器品质因子高，尺寸小，其性能已超过声表面波滤波器，将其替代 传统的射频滤波器极具性能和价格优势。本文建立了适用于体声波滤波器性能分析的巴特沃斯— 范戴克(MBVD)模型，采用梯形级联方式设计了一种射频体声波滤波器的版图。在此基础上以中心 频率为 1.99 GHz ，带宽 56 MHz 的体声波滤波器为例，对不同连接级数梯形滤波器的插入损耗、阻 带抑制进行了仿真与分析讨论，在 4 阶滤波器中其带外衰减达到了-29.708 dB 。采用微机电机械系 统工艺制备的 2 阶和 3 阶滤波器传输特性的测试曲线与仿真结果基本吻合，表明射频体声波滤波 器具有广泛的应用前景。该模拟结果可作为射频体声波滤波器设计的一个重要参考。 关键词：体声波滤波器；梯形滤波器；通信系统；频率特性 中图分类号：TN713 文献标识码：A Layout design and simulation of a radio frequency bulk acoustic wave filter GU Li，ZHONG Yi (School of Information Engineering，Wuhan University of Technology，Wuhan Hubei 430070，China) Abstract： Bulk acoustic wave filter fabricated by Complementary Metal Oxide Semiconductor(CMOS) is of high-quality factor and small size，which is better than Surface Acoustic Wave(SAW) Bulk acoustic wave filters. It has been used to take the place of conventional Radio Frequency(RF) filters for its outstanding performance and price advantage. The Modified Butterworth-Van Dyke(MBVD) model was built to analyze the frequency response of bulk acoustic wave filters. A kind of ladder RF bulk acoustic wave filter layout was designed. Based on the layout of the filter，the frequency characteristics of the varied ladder filters centering on 1.99 GHz with bandwidth 56 MHz were simulated by MBVD model and the out band attention of 4-order filter w