残留气体分析在物理气相沉积中应用与发展.pdfVIP

摘 要 残留气体分析器（residual gas analysis, RGA）具有很高的化学选择性和 灵敏度,因此长期应用于在半导体制造中以及化学工艺过程的监控和异常情况检 测。随着制程技术层次的不断提高，复杂度的不断增加，单片成本提高，那么要 维持低成本，高良率及高机台使用效益，增加本身的竞争优势，残余气体分析仪， 则是一种行之有效的工具。未来趋势已逐渐走向12英寸晶圆，当晶圆成本不断 提高，这样因意外或异常现象造成的生产损失也相对地提高。因此RGA作为线上 同步制程侦控的手段的必须性也被进一步地认可。 本文对残留气体分析器（RGA）的应用背景，作用原理，种类介绍进行说明。 本文具体分析残留气体分析器（RGA）在物理气相沉积（PVD）生产制程中的 应用，即RGA系统提供工艺和四极柱质谱仪的工作原理以及应用。 关键词：物理气相沉积，残留气体分析器，四极柱质谱仪 Ⅱ ABSTRACT Residual gas analyzer (residual gas analysis, RGA) with high chemical selectivity and sensitivity,.It has a long history of applications for chemical process monitoring and anomaly detection. in semiconductor manufacturing. In the process technology level continues to improve, complex and ever-increasing chip costs under a variety of factors to consider, to maintain low cost, high yield and high efficiency of using the machine in order to better increase their competitive advantage. The residual gas analyzer is a very useful tool. 12-inch wafers has gradually become the future trend. The wafer cost is increasing relatively by accident or abnormal production losses. Therefore, the RGA for online synchronization process detective is also to be further recognized. In this paper, residual gas analyzer (RGA) of the application background, the role of theory, introduced species are described. This paper analyse the residual gas analyzer (RGA) in the physical vapor deposition (PVD) production process detailedly, and RGA system and four-pole mass spectrometer technology works, and applications. Key words: Physical Vapor Deposition (PVD) ，Residual Gas Analyzer （RGA ）, Four-pole mass spectrometer. Ⅲ 目 录 第一章 绪论 1 1.1 引言 1 1.2 RGA的应用背景