化学气相沉积钨铼合金工艺研究-中国表面工程.PDF

19 6 Vol.19 No.6 2006 12 CHINA SURFACE ENGINEERING December. 2006 6 39 * 100022 ReF WF H 6 6 2 ReF 6 ReF ReF + 6 6 + TG146.4 A 1007–9289(2006)06–0039–04 The Technics of W-Re Alloy Coating by Chemical Vapor Deposition WANG Lu-yan, WANG Cong-zeng, MA Jie, HOU Yan-yan (The Key Laboratory of Advanced Functional Materials, Ministry of Education, Beijing University of Technology, Beijing 100022) Abstract W−Re alloys have been deposited successfully on copper substrate by chemical vapor deposition using the mixture of ReF , WF and H .The composition, microstructure and performance of the deposits have been analyzed. The results showed 6 6 2 that the deposits are homogeneous, their composition can be controlled by the variation of WF6 or ReF6 percentage in the mixture. With the increase of ReF6 content, rhenium in the alloy increases as well. With the increase of temperature or content of ReF , the microstructure changes from columnar to disordered dendrite crystal. With the increase of ReF , the structure of 6 6 deposited layer changes from W-Re solid solution to W−Re solid solution+ inter-metallic compound W0.80Re0.20+Re particle. Key words chemical vapor deposition ; W-Re alloys; technics 0 1 [13] 10 %26 % 1.1 [4] (1)