大口径光学元件超精密加工技术与应用-CORE.PDF

49 19 Vol.49 No.19 2013 10 JOURNAL OF MECHANICAL ENGINEERING Oct. 2 0 1 3 DOI 10.3901/JME.2013.19.171 * ( 361005) TG58 Technology and Application of Ultra-precision Machining for Large Size Optic GUO Yinbiao YANG Wei WANG Zhenzhong PENG Yunfeng BI Guo YANG Ping (Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005) Abstract The ultra-precision machining technology of large size optic is a comprehensive application of various sciences, which promotes the development for civil and national defense use. Under the processing of national optical project, our country makes great progress in this field. The development of ultra-precision machining technology for large size optic in micro/nano machining and measuring laboratory of Xiamen University is introduced, particularly in grinding equipment, grinding process, precise measuring, controlled bonnet polishing, environment monitoring, mid-spatial frequency error assessing and et al. From the requirement of the ultra-precision machining, the laboratory uses the experience of other countries for reference and integrates the above technology, then forms an intellectual property of grinding and polishing system independently for large size optic manufacture. Key words Ultra-precision machining Grinding equipment Grinding process Prec