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氮气分压对AlCrTiSiN超晶格涂层结构及力学性能的影响* 牛宝林1，陈汪林2，刘媛2，张世宏2 (小四，华文中宋) （ 芜湖职业技术学院芜湖 241001 安徽工业大学 材料学院， 马鞍山 243002） 摘 要(10，黑体)：超晶格涂层因具有优异的力学性能及抗氧化性能在刀具涂层工业中备受关注。采用多弧离子镀技术在高速钢表面制备了AlCrTiSiN超晶格涂层AlCrTiSiN超晶格涂层微观结构及力学性能的影响。利用、原子力显微镜研究了AlCrTiSiN超晶格涂层微观结构利用纳米压痕仪、划痕仪和磨损仪研究了AlCrTiSiN超晶格涂层力学性能研究结果表明不同氮气分压的AlCrTiSiN超晶格涂层均由纳米(Cr,Al)N相、(Ti,Al)N相和(Cr,Al)2N相以及非晶态的Si相和Si3N4相组成。与氮气分压为4 Pa的涂层相比，2 Pa或3 Pa的涂层具有更高的硬度、抗载荷能力涂层-基体结合强度，以及更低的摩擦因数及磨损率。此外45钢和铸铁切削试验表明，AlCrTiSiN涂层刀具较AlCrN涂层刀具有更好的切削性能，无涂层刀具具有最差的切削性能。 关键词(10，黑体)：多弧离子镀；超晶格涂层；AlCrTiSiN; 微观组织；力学性能中图分类号：文献标识码：A 文章编号：1007–9289(20)00–0000–00（段后空一行） Effects of N2 Partial Pressure on Microstructure and Mechanical Property of AlCrTiSiN Superlattice Coatings(小四，Times New Roman，居中，段前段后各空一行) NIU Bao–lin1, CHEN Wang–lin2, LIUShu-yuan2, ZHANG Shi–hong2(五号 居中Times New Roman) (1. Wuhu Institute of Technology, College of Mechanical Engineering, Anhui Wuhu, 241001; 2. Anhui University of Technology, School of Material Science, Anhui Ma’anshan, 243002) (小五，Times New Roman，段后空一行) Abstract(10，加粗): Upperlattice coatings have been extensively paid attention due to their excellent mechanical properties and oxidation resistance during the cutting tool industry. AlCrTiSiN superlattice coatings deposited on the surface of high-speed steels were produced by multi-arc ion plating, and the effect of nitrogen partial pressure on microstructures and mechanical properties of these AlCrTiSiN superlattice coatings were investigated. XRD, XPS and SEM were carried out to study the microstructures of these superlattice coatings, and nanoindetation test, scratch tester and pin-on-disk tribo-test were performed to measure their mechanical properties. The results show that the microstructures of the superlattice coatings are composed of nanocrystalline (Cr,Al)N phase, (Ti,Al)N phase and (Cr,Al)2N phases as well as amorphous Si and Si3N4 phases. Compared with the superlattice coating deposited at nitrogen gas partial pressure of 4 Pa, 。。。。。。。。。。cutting experiments of 45# steel